SiC-FET methanol sensors for process control and leakage detection
نویسندگان
چکیده
منابع مشابه
Development of SiC-FET methanol sensor
A silicon carbide based field effect transistor (SiC-FET) structure was used for methanol sensing. Due to the chemical stability and wide band gap of SiC, these sensors are suitable for applications over a wide temperature range. Two different catalytic metals, Pt and Ir, were tested as gate contacts for detection of methanol. The sensing properties of both Ir gate and Pt gate SiC-FET sensors w...
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ژورنال
عنوان ژورنال: Sensors and Actuators B: Chemical
سال: 2013
ISSN: 0925-4005
DOI: 10.1016/j.snb.2013.04.019